A subaperture stitching algorithm for aspheric surfaces

Po Chih Lin, Yi Chun Chen, Chung Min Lee, Chao Wen Liang

研究成果: 書貢獻/報告類型會議論文篇章同行評審

6 引文 斯高帕斯(Scopus)


A subaperture stitching algorithm was developed for testing aspheric surfaces. The full aperture was divided into one central circular region plus several partially-overlapping annuli. Each annulus was composed of partially-overlapping circular subapertures. The phase map in each subaperture was obtained through the phase-shifting interferometry and retrieved by an iterative tilt-immune phase-shifting algorithm and a Zernike-polynomial-based phase-unwrapping process. All subapertures in one annulus were stitched simultaneously in least-squares sense. By eliminating the relative piston and tilt between adjacent subapertures, the sum of squared errors in the overlapped regions was minimized. The phase stitching between annuli also utilized the least-squares method in the overlapped region. Simulation results on a test wavefront with 30-wave spherical aberrations demonstrated the effectiveness of the proposed algorithm. The rms phase residue after the phase-shifting, phase-unwrapping and phase-stitching processes was 0.006 waves, which met the precision requirement of common interferometers. This algorithm should be applicable to general surfaces in subaperture stitching interferometry.

主出版物標題Optical Measurement Systems for Industrial Inspection VII
出版狀態已出版 - 2011
事件Optical Measurement Systems for Industrial Inspection VII - Munich, Germany
持續時間: 23 5月 201126 5月 2011


名字Proceedings of SPIE - The International Society for Optical Engineering


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