A robust high-Q micromachined RF inductor for RFIC applications

Keyphrases

• Inductors 100%
• Circuit Application 100%
• Micromachining 100%
• Radio-frequency Integrated Circuit (RF IC) 100%
• RF Inductor 100%
• Micromachined Inductors 66%
• Cross-sectional Shape 66%
• Signal Stability 66%
• Inductance Variation 66%
• Measurement Results 33%
• CMOS Technology 33%
• Silica 33%
• Silicon Nitride 33%
• Temperature Variation 33%
• Blanket 33%
• Electrical Performance 33%
• Substrate Removal 33%
• Working Temperature 33%
• Spiral Inductor 33%
• Freely Suspended 33%
• Dielectric Supports 33%
• Structure Rigidity 33%
• Dielectric Membranes 33%
• Sandwich Membrane 33%
• Quality Factor Improvement 33%
• Membrane Support 33%
• Suspended Inductor 33%

Engineering

• Radio Frequency 100%
• Q Factor 100%
• Integrated Circuit 100%
• Dielectrics 66%
• Temperature Change 33%
• Rigidity 33%
• Electrical Performance 33%
• Silicon Dioxide 33%

Material Science

• Electronic Circuit 100%
• Dielectric Material 66%
• Silicon Nitride 33%
• Rigidity 33%