A Pulsed RTN Transient Measurement Technique: Demonstration on the Understanding of the Switching in Resistance Memory

E. R. Hsieh, H. W. Cheng, Z. H. Huang, C. H. Chuang, S. P. Yang, Steve S. Chung

研究成果: 書貢獻/報告類型會議論文篇章同行評審

3 引文 斯高帕斯(Scopus)

摘要

The oxygen vacancy and mobile ions play major role on the resistance switching in a typical RRAM by the modulation of filament conduction. It is also known that soft-breakdown played a major role on the switching mechanism. However, the understanding of the mechanism involved in the soft-breakdown is not clear enough. In this paper, we demonstrated a pulsed RTN transient measurement technique which enables the determination of trap generation and its evolution with time. On the demonstrated sample with a HfON/Al2O3 MIM structure, different operations will generate different traps which can be revealed from the trap profiling. The soft-breakdown path can then be delineated for forming, SET/RESET processes. The results show that the path behaves like a cone, widening at the bottom electrode and narrowing on the top, with a neck and waist near 2 electrodes, which can properly describe the RRAM operations.

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主出版物標題2020 IEEE International Reliability Physics Symposium, IRPS 2020 - Proceedings
發行者Institute of Electrical and Electronics Engineers Inc.
ISBN(電子)9781728131993
DOIs
出版狀態已出版 - 4月 2020
事件2020 IEEE International Reliability Physics Symposium, IRPS 2020 - Virtual, Online, United States
持續時間: 28 4月 202030 5月 2020

出版系列

名字IEEE International Reliability Physics Symposium Proceedings
2020-April
ISSN(列印)1541-7026

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???event.eventtypes.event.conference???2020 IEEE International Reliability Physics Symposium, IRPS 2020
國家/地區United States
城市Virtual, Online
期間28/04/2030/05/20

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