摘要
The design, fabrication and measurement of a silicon-on-insulator (SOI) two-dimensional photonic crystal ring resonator are demonstrated in this study. The structure of the photonic crystal is comprised of silicon nano-rods arranged in a hexagonal lattice on an SOI wafer. The photonic crystal ring resonator allows for the simultaneous separation of light at wavelengths of 1.31 and 1.55μm. The device is fabricated by e-beam lithography. The measurement results confirm that a 1.31μm/1.55μm wavelength ring resonator filter with a nano-rod photonic crystal structure can be realized.
原文 | ???core.languages.en_GB??? |
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頁(從 - 到) | 15500-15506 |
頁數 | 7 |
期刊 | Optics Express |
卷 | 15 |
發行號 | 23 |
DOIs | |
出版狀態 | 已出版 - 12 11月 2007 |