A novel silicide and germanosilicide by NiCo alloy for Si and SiGe source/drain contact with improved thermal stability

Chi Hsuan Cheng, Cheng Lun Hsin

研究成果: 雜誌貢獻 › 期刊論文 › 同行評審

12 引文 斯高帕斯（Scopus）

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Keyphrases

Material Science

Earth and Planetary Sciences

Chemical Engineering