A novel Si-based stacked free space pick-up head and holographic optical element

Chien Chieh Lee, Jenq Yang Chang, Yu Cheng Chang, Guo Chung Chi

研究成果: 書貢獻/報告類型會議論文篇章同行評審

摘要

We propose an optical pick-tip head system, which can be used in optical MEMS technology, has been designed on stacked Si substrates. Transmission holographic grating was fabricated and studied the diffraction effect of the holographic optical element.

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主出版物標題CLEO/Pacific Rim 2003 - 5th Pacific Rim Conference on Lasers and Electro-Optics
主出版物子標題Photonics Lights Innovation, from Nano-Structures and Devices to Systems and Networks, Proceedings
發行者Institute of Electrical and Electronics Engineers Inc.
頁面568
頁數1
ISBN(電子)0780377664
DOIs
出版狀態已出版 - 2003
事件5th Pacific Rim Conference on Lasers and Electro-Optics, CLEO/Pacific Rim 2003 - Taipei, Taiwan
持續時間: 15 12月 200319 12月 2003

出版系列

名字Pacific Rim Conference on Lasers and Electro-Optics, CLEO - Technical Digest
2

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???event.eventtypes.event.conference???5th Pacific Rim Conference on Lasers and Electro-Optics, CLEO/Pacific Rim 2003
國家/地區Taiwan
城市Taipei
期間15/12/0319/12/03

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