TY - JOUR
T1 - A new PZT piezoelectric sensor for gravimetric applications using the resonance-frequency detection
AU - Tsai, J. Z.
AU - Chen, C. J.
AU - Chen, W. Y.
AU - Liu, J. T.
AU - Liao, C. Y.
AU - Hsin, Y. M.
N1 - Funding Information:
The authors are grateful to the National Science Council of Taiwan for supporting this research under grant numbers NSC 96-2221-E-008-113-MY2, NSC 95-2221-E-008-169 and DOH98-TD-N-111-007.
PY - 2009/6/4
Y1 - 2009/6/4
N2 - Piezoelectric sensors made of quartz, Pb(Zr,Ti)O3, Pb(La,Zr,Ti)O3, or Pb(Zr,Ti,Sn)Oy have rapidly been developed recently because of the potential applications in devices such as biosensors, accelerometers, pressure sensors, and ultrasonic transducers. However, the development of devices with reduced size but with improved sensitivity is highly important. With this idea, the study aims to develop a lead zironate titanate (PZT) chip as a novel gravimetric biosensor using the resonance feature in biomolecule detection. The PZT thin film characterized by the X-ray diffractometer (XRD) has a perovskite structure. The fabricated PZT sensor was designed with 250 μm × 250 μm-sensing areas of electrodes, determined by the measured impedance at 98.5 MHz frequency. The morphology and cross-section of scanning electron microscope (SEM) images show that the thickness of the spin-on PZT layer was about 500 nm and the crystal grain size was less than 50 nm. Moreover, an evaluation circuit consisted of a resonance circuit and a frequency-to-voltage circuit was established to detect bovine serum albumin (BSA) protein. The PZT sensor, combined with evaluation circuit, showed a high sensitivity of 62.8 Hz cm2/ng. The detection sensitivity was enhanced by 300 folds than that of traditional quartz crystal microbalance (QCM).
AB - Piezoelectric sensors made of quartz, Pb(Zr,Ti)O3, Pb(La,Zr,Ti)O3, or Pb(Zr,Ti,Sn)Oy have rapidly been developed recently because of the potential applications in devices such as biosensors, accelerometers, pressure sensors, and ultrasonic transducers. However, the development of devices with reduced size but with improved sensitivity is highly important. With this idea, the study aims to develop a lead zironate titanate (PZT) chip as a novel gravimetric biosensor using the resonance feature in biomolecule detection. The PZT thin film characterized by the X-ray diffractometer (XRD) has a perovskite structure. The fabricated PZT sensor was designed with 250 μm × 250 μm-sensing areas of electrodes, determined by the measured impedance at 98.5 MHz frequency. The morphology and cross-section of scanning electron microscope (SEM) images show that the thickness of the spin-on PZT layer was about 500 nm and the crystal grain size was less than 50 nm. Moreover, an evaluation circuit consisted of a resonance circuit and a frequency-to-voltage circuit was established to detect bovine serum albumin (BSA) protein. The PZT sensor, combined with evaluation circuit, showed a high sensitivity of 62.8 Hz cm2/ng. The detection sensitivity was enhanced by 300 folds than that of traditional quartz crystal microbalance (QCM).
KW - Biosensor
KW - Lead zironate titanate (PZT)
KW - Piezoelectric
KW - Resonance frequency
UR - http://www.scopus.com/inward/record.url?scp=65749089115&partnerID=8YFLogxK
U2 - 10.1016/j.snb.2009.03.055
DO - 10.1016/j.snb.2009.03.055
M3 - 期刊論文
AN - SCOPUS:65749089115
SN - 0925-4005
VL - 139
SP - 259
EP - 264
JO - Sensors and Actuators, B: Chemical
JF - Sensors and Actuators, B: Chemical
IS - 2
ER -