A multi-step deposited AlN films in a DC pulsed sputtering and film characteristics classification with principal component analysis of OES data

Wei Lun Chen, Wei Yu Zhou, Ning Hsiu Yuan, Shang Shian Yang, Peter J. Wang, Hsiao Han Lo, Tomi T. Li, Yiin kuen Fuh

研究成果: 雜誌貢獻期刊論文同行評審

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Engineering & Materials Science