Keyphrases
Principal Coordinate Analysis (PCoA)
100%
Residual Stress
100%
Aluminum Nitride Film
100%
Optical Emission Spectroscopy
100%
DC Sputtering
100%
Film Characteristics
100%
Characteristic Classification
100%
Microstructure
50%
Four-step
50%
Multistep Deposition
50%
Residual Film
50%
In Situ
25%
Atomic Force Microscopy
25%
Fourier Transform Infrared Spectroscopy (FT-IR)
25%
Surface Roughness
25%
Scanning Electron Microscopy
25%
X Ray Diffraction
25%
Film Properties
25%
Crystallites
25%
Ion-induced
25%
Microstructural Changes
25%
Big Data Analysis
25%
Nitrides
25%
Grain Size
25%
Substrate Temperature
25%
Deposition Methods
25%
Stress Gradient
25%
Crystal Orientation
25%
Microstructural Characteristics
25%
Film Deposition
25%
Data Preprocessing
25%
Ion Bombardment
25%
In Films
25%
Microstructural Analysis
25%
Stress Characteristics
25%
Plasma Deposition
25%
Stress Features
25%
Stress Property
25%
Feature Films
25%
Dominant Wavelength
25%
Characteristic Comparison
25%
One-step Deposition
25%
Cross-validation Test
25%
Gradient Control
25%
Engineering
Principal Components
100%
Component Analysis
100%
Nitride
100%
Residual Stress
100%
Light Emission
100%
One Step
75%
Crystallite
50%
Atomic Force Microscopy
25%
Ray Diffraction
25%
Ion Implantation
25%
Substrate Temperature
25%
Film Property
25%
Stress Gradient
25%
Data Preprocessing
25%
Component Value
25%
Dominant Wavelength
25%
FTIR Spectroscopy
25%
Material Science
Aluminum Nitride
100%
Film
100%
Emission Spectroscopy
100%
Residual Stress
40%
Crystallite
20%
Scanning Electron Microscopy
10%
Surface Roughness
10%
X-Ray Diffraction
10%
Fourier Transform Infrared Spectroscopy
10%
Grain Size
10%
Film Deposition
10%
Microstructural Analysis
10%
Plasma Deposition
10%
Ion Bombardment
10%
Atomic Force Microscopy
10%