A Low Noise 0.18-m Standard-CMOS-Based Silicon Avalanche Photodiode with a T-shaped Polysilicon Grating

Kuo Yu Lee, Yin Jung Chang, Jau Horng Chen

研究成果: 書貢獻/報告類型會議論文篇章同行評審

摘要

A 0.18-m CMOS silicon avalanche photodiode with a polysilicon grating is presented. The unamplified responsivity is 29.89% higher than that without the grating. The structure-enabled doping profile results in a dark current of 1 pA.

原文???core.languages.en_GB???
主出版物標題25th Opto-Electronics and Communications Conference, OECC 2020
發行者Institute of Electrical and Electronics Engineers Inc.
ISBN(電子)9781728154459
DOIs
出版狀態已出版 - 4 10月 2020
事件25th Opto-Electronics and Communications Conference, OECC 2020 - Taipei, Taiwan
持續時間: 4 10月 20208 10月 2020

出版系列

名字25th Opto-Electronics and Communications Conference, OECC 2020

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???event.eventtypes.event.conference???25th Opto-Electronics and Communications Conference, OECC 2020
國家/地區Taiwan
城市Taipei
期間4/10/208/10/20

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