A hybrid inorganic-organic barrier film deposited by magnetron sputtering

Cheng Chung Lee, Meng Chi Li, Shih Fang Liao, Chin Lun Wei, Sheng Chieh Huang, Chien Cheng Kuo

研究成果: 書貢獻/報告類型會議論文篇章同行評審

摘要

A magnetron sputtering system with plasma polymerized organic monomer was developed. The barrier films, the best WVTR value of 7.6×10-2 g/m2/day, was deposited by magnetron sputtering coupled with HMDSO/O2 plasma polymerization.

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主出版物標題Optical Interference Coatings, OIC 2013
出版狀態已出版 - 2013
事件Optical Interference Coatings, OIC 2013 - Whistler, Canada
持續時間: 16 6月 201321 6月 2013

出版系列

名字Optics InfoBase Conference Papers
ISSN(電子)2162-2701

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???event.eventtypes.event.conference???Optical Interference Coatings, OIC 2013
國家/地區Canada
城市Whistler
期間16/06/1321/06/13

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