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A Fault Tolerance Mechanism for Semiconductor Equipment Monitoring
Shao Jui Chen, Hsueh Wen Liu,
Wei Jen Wang
前瞻科技研究中心
資訊工程學系
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會議論文篇章
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引文 斯高帕斯（Scopus）
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Keyphrases
Wafer
100%
Semiconductor Equipment
100%
Fault Tolerance Mechanism
100%
Equipment Monitoring
100%
Monitoring System
75%
Semiconductor Manufacturing
75%
Manufacturing Technology
50%
Alarm System
50%
Manufacturing Environment
50%
Fault Tolerance
25%
Failure Time
25%
Yield Rate
25%
Manufacturing Process
25%
Checkpointing
25%
Monitoring Data
25%
Mechanism-based
25%
False Alarm
25%
Recovery Time
25%
Failover
25%
Monitoring Approach
25%
Monitoring Mechanism
25%
Time Information
25%
TCPIP
25%
Technology Advancement
25%
Downtime
25%
Decision Time
25%
Financial Loss
25%
Human Intervention
25%
Manufacturing Machines
25%
New Fault
25%
System Crash
25%
Service Redundancy
25%
Large Business
25%
Engineering
Fits and Tolerances
100%
Semiconductor Manufacturing
100%
Monitoring System
100%
Manufacturing Engineering
66%
Design and Environment
66%
Alarm System
66%
Critical Dimension
33%
Failure Time
33%
Manufacturing Process
33%
False Alarm
33%
Recovery Time
33%
Monitoring Data
33%
Manufacturing Machine
33%
Decision Time
33%
Human Intervention
33%
Final Product
33%
Computer Science
Monitoring System
100%
Fault Tolerance Mechanism
100%
fault-tolerance
33%
Checkpointing
33%
Time Information
33%
Technology Advance
33%
Monitoring Data
33%
Human Intervention
33%