A compact tapping mode AFM with sliding mode controller for precision image scanning

Keyphrases

• Atomic Force Microscope 100%
• Sliding Mode Controller 100%
• Image Scanning 100%
• Tapping Mode 100%
• Compact Disc 66%
• Digital Versatile Disc 66%
• Voltage Compensation 66%
• Controller 33%
• Control Mechanism 33%
• Self-design 33%
• Image Distortion 33%
• Atomic Force Microscopy 33%
• Deflection 33%
• Laser Spot 33%
• Detection Sensor 33%
• Sliding Mode Control Method 33%
• Optical Interference 33%
• Ultra-high Resolution 33%
• Piezoelectric Positioning Stage 33%
• Scanning Process 33%
• Laser Energy 33%
• Control Approach 33%
• Adaptive Sliding Mode Control 33%
• Microscopy System 33%
• Hysteresis Phenomenon 33%
• High-precision Positioning 33%
• Gain Tuning 33%
• Microscope Image 33%
• Surface Imaging 33%
• AFM Cantilever 33%
• Sensing Error 33%
• Probe Scan 33%

Engineering

• Atomic Force Microscope 100%
• Sliding Mode Controller 100%
• Tapping Mode 100%
• Compact Disk 66%
• Experimental Result 33%
• Control System 33%
• High Resolution 33%
• Atomic Force Microscopy 33%
• Piezoelectric 33%
• Sliding Mode Control 33%
• Scanning Process 33%
• Hysteresis Phenomenon 33%
• Sensing Error 33%
• Laser Energy 33%