@inproceedings{034f942ec3e34b598c155633aede0a3b,
title = "A CMOS-MEMS Three-Axis Magnetic Sensor with a Ferromagnetic Concentrator",
abstract = "This study proposes a three-axis capacitive Lorentz force magnetic field sensor based on a 0.18 μm CMOS process. By integrating two different capacitance structures, this design can detect both out-of-plane and in-plane motion, respectively, and thus can measure three-axis magnetic fields. In addition, ferromagnetic materials are added to the chip to focus out-of-plane magnetic fields and improve sensitivity. This sensor can be used as a current sensor for IOT devices.",
keywords = "CMOS MEMS, Lorentz force, sensor",
author = "Lai, {Yun Wen} and Yang, {Yu Lin} and Chen, {Shih Jui}",
note = "Publisher Copyright: {\textcopyright} 2023 IEEJ.; 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023 ; Conference date: 25-06-2023 Through 29-06-2023",
year = "2023",
language = "???core.languages.en_GB???",
series = "2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "1547--1550",
booktitle = "2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023",
}