A capacitive micromachined ultrasonic transducer array for minimally invasive medical diagnosis

Keyphrases

• Minimally Invasive 100%
• Ultrasonic Transducer Arrays 100%
• Medical Diagnosis 100%
• Capacitive Micromachined Ultrasonic Transducer 100%
• Transducer Array 66%
• Two-layer 33%
• High-resolution 33%
• Silicon Substrate 33%
• Penetration Depth 33%
• Phased Array 33%
• Ultrasonic Transducer 33%
• Polysilicon 33%
• Ultrasound 33%
• Silicon Probe 33%
• High-frequency Ultrasound 33%
• Micromachining 33%
• Surface Micromachining Process 33%
• Probe Shape 33%
• Lamb Waves 33%
• B-mode Image 33%
• Miniaturized Size 33%
• Shank 33%
• Ultrasonic Diagnosis 33%
• Precision Diagnosis 33%
• Polysilicon Membrane 33%
• Shank Length 33%
• Substrate Thickness 33%
• Miniaturization 33%

Engineering

• Ultrasonics 100%
• Capacitive 100%
• Transducer 100%
• Polysilicon 33%
• High Resolution 16%
• Silicon Substrate 16%
• Penetration Depth 16%
• Surface Micro-Machining 16%
• Lamb Wave 16%
• Crosstalk 16%