3D microstructuring of Pyrex glass using the electrochemical discharge machining process

Zhi Ping Zheng, Wei Hsin Cheng, Fuang Yuan Huang, Biing Hwa Yan

研究成果: 雜誌貢獻期刊論文同行評審

135 引文 斯高帕斯(Scopus)

摘要

Electrochemical discharge machining (ECDM) is demonstrated to be a potential process for 3D microstructuring of Pyrex glass. However, the key to widening ECDM micromilling applications lies in how to improve the machining accuracy. To improve the machining quality of the ECDM micromilling process, microgroove machining experiments were conducted in this study. Three factors affecting ECDM micromilling performance - pulse voltage, tool rotational rate and travel rate of tool - were taken up as machining parameters to investigate their influences on machining performance. The results indicate that optimum combinations of both pulse voltage and tool rotational rate will realize better machining accuracy. The feasibility of three-dimensional microstructure machining was demonstrated by layer-by-layer ECDM micromilling machining. Complex structures were made to demonstrate the great potential for the 3D microstructuring of Pyrex glass of the ECDM micromilling process.

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文章編號016
頁(從 - 到)960-966
頁數7
期刊Journal of Micromechanics and Microengineering
17
發行號5
DOIs
出版狀態已出版 - 1 5月 2007

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