3D displacement measurement with pico-meter resolution using single heterodyne grating interferometry

C. C. Hsu, J. Y. Lee, C. C. Wu, H. C. Shih

研究成果: 雜誌貢獻期刊論文同行評審

摘要

The precision positioning device becomes significant requirement in scientific instruments used for the applications of nanotechnology for a few decades. To achieve the high resolution positioning, the sensing methods of displacement sensor become more important in positioning device. In this paper, a novel method is presented for measuring both in-plane/out-plane displacements with the single heterodyne grating interferometry (HGI). We demonstrated the ID, 2D, and 3D measurement results respectively and the smallest displacement can be detected was better than 6 pm. Furthermore, the nanometer resolution can be ensured within 20 /jm displacement. Hence, the in-plane/out-plane measurements with single apparatus can be realized by our method and might be a displacement sensor using in the motorized stage with suitable opto-mechanics structure minimization.

原文???core.languages.en_GB???
頁(從 - 到)283-286
頁數4
期刊Key Engineering Materials
381-382
DOIs
出版狀態已出版 - 2008

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