@inproceedings{aa7127bcd47f46b09e691fffac34c2f9,
title = "2-DOF in-Plane Displacement Measurement by Wollaston Prism-based Interferometer",
abstract = "A Wollaston prism (WP)-based interferometer for two-degree-of-freedom (2-DOF) in-plane displacement measurement is developed in this study. The measurement system consists of a heterodyne light source and a high quality WP, and can provide 2-DOF in-plane displacement measurement with high accuracy and stability. Experiments demonstrate that the system has a resolution of 5 nm, and is resistant to outside disturbances as well as internal errors.",
keywords = "in-plane displacement, interferometer, Wollaston prism",
author = "Hsieh, {Hung Lin} and Lee, {Ju Yi} and Sun, {Bo Yen} and Fan, {Gang Yu}",
note = "Publisher Copyright: {\textcopyright} 2018 IEEE.; 14th IEEE/ASME International Conference on Mechatronic and Embedded Systems and Applications, MESA 2018 ; Conference date: 02-07-2018 Through 04-07-2018",
year = "2018",
month = aug,
day = "27",
doi = "10.1109/MESA.2018.8449196",
language = "???core.languages.en_GB???",
isbn = "9781538646434",
series = "2018 14th IEEE/ASME International Conference on Mechatronic and Embedded Systems and Applications, MESA 2018",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
booktitle = "2018 14th IEEE/ASME International Conference on Mechatronic and Embedded Systems and Applications, MESA 2018",
}