10-Gbit/s on-chip optical interconnect module using silicon-based 45° micro-reflectors terminated polymer waveguides

In this paper, we propose a 10-Gbit/s optical interconnect module realized on the silicon optical bench (SiOB) using the silicon-based 45° micro-reflectors terminated the polymer waveguides. The silicon-based 45° micro-reflectors are fabricated on an orientation-defined (100) silicon substrate by using anisotropic chemical wet etching. The VCSEL and PD chips are assembled at the input and output ports of proposed module to demonstrate an out-of-plane optical coupling for the on-chip optical interconnects. The transmission efficiency of as high as -2.8 dB is experimentally obtained with a polymer-waveguide length of 0.5 cm. The clearly 10-Gbit/s electrical eye pattern is obtained and verifies that such a proposed module is suitable for the optical interconnects.