10-Gbit/s on-chip optical interconnect module using silicon-based 45° micro-reflectors terminated polymer waveguides

Mao Yuan Zeng; Chin Ta Chen; Po Kuan Shen; Kai Liang; Chia Chi Chang; Hsu Liang Hsiao; Hsiao Chin Lan; Yun Chih Lee; Yo Shen Lin; Mount Learn Wu

10-Gbit/s on-chip optical interconnect module using silicon-based 45° micro-reflectors terminated polymer waveguides

Mao Yuan Zeng, Chin Ta Chen, Po Kuan Shen, Kai Liang, Chia Chi Chang, Hsu Liang Hsiao, Hsiao Chin Lan, Yun Chih Lee, Yo Shen Lin, Mount Learn Wu

電機工程學系

研究成果: 書貢獻/報告類型 › 會議論文篇章 › 同行評審

摘要

In this paper, we propose a 10-Gbit/s optical interconnect module realized on the silicon optical bench (SiOB) using the silicon-based 45° micro-reflectors terminated the polymer waveguides. The silicon-based 45° micro-reflectors are fabricated on an orientation-defined (100) silicon substrate by using anisotropic chemical wet etching. The VCSEL and PD chips are assembled at the input and output ports of proposed module to demonstrate an out-of-plane optical coupling for the on-chip optical interconnects. The transmission efficiency of as high as -2.8 dB is experimentally obtained with a polymer-waveguide length of 0.5 cm. The clearly 10-Gbit/s electrical eye pattern is obtained and verifies that such a proposed module is suitable for the optical interconnects.

原文	???core.languages.en_GB???
主出版物標題	Technical Digest of the 18th Microoptics Conference, MOC 2013
出版狀態	已出版 - 2013
事件	2013 18th Microoptics Conference, MOC 2013 - Tokyo, Japan 持續時間: 27 10月 2013 → 30 10月 2013

出版系列

名字	Technical Digest of the 18th Microoptics Conference, MOC 2013

???event.eventtypes.event.conference???

???event.eventtypes.event.conference???	2013 18th Microoptics Conference, MOC 2013
國家/地區	Japan
城市	Tokyo
期間	27/10/13 → 30/10/13

引用此

Zeng, M. Y., Chen, C. T., Shen, P. K., Liang, K., Chang, C. C., Hsiao, H. L., Lan, H. C., Lee, Y. C., Lin, Y. S., & Wu, M. L. (2013). 10-Gbit/s on-chip optical interconnect module using silicon-based 45° micro-reflectors terminated polymer waveguides. 於 Technical Digest of the 18th Microoptics Conference, MOC 2013 文章 6715159 (Technical Digest of the 18th Microoptics Conference, MOC 2013).

@inproceedings{0daad4134874453c85106e620d782610,

title = "10-Gbit/s on-chip optical interconnect module using silicon-based 45° micro-reflectors terminated polymer waveguides",

abstract = "In this paper, we propose a 10-Gbit/s optical interconnect module realized on the silicon optical bench (SiOB) using the silicon-based 45° micro-reflectors terminated the polymer waveguides. The silicon-based 45° micro-reflectors are fabricated on an orientation-defined (100) silicon substrate by using anisotropic chemical wet etching. The VCSEL and PD chips are assembled at the input and output ports of proposed module to demonstrate an out-of-plane optical coupling for the on-chip optical interconnects. The transmission efficiency of as high as -2.8 dB is experimentally obtained with a polymer-waveguide length of 0.5 cm. The clearly 10-Gbit/s electrical eye pattern is obtained and verifies that such a proposed module is suitable for the optical interconnects.",

author = "Zeng, {Mao Yuan} and Chen, {Chin Ta} and Shen, {Po Kuan} and Kai Liang and Chang, {Chia Chi} and Hsiao, {Hsu Liang} and Lan, {Hsiao Chin} and Lee, {Yun Chih} and Lin, {Yo Shen} and Wu, {Mount Learn}",

year = "2013",

language = "???core.languages.en_GB???",

isbn = "9784863483453",

series = "Technical Digest of the 18th Microoptics Conference, MOC 2013",

booktitle = "Technical Digest of the 18th Microoptics Conference, MOC 2013",

note = "2013 18th Microoptics Conference, MOC 2013 ; Conference date: 27-10-2013 Through 30-10-2013",

}

Zeng, MY, Chen, CT, Shen, PK, Liang, K, Chang, CC, Hsiao, HL, Lan, HC, Lee, YC, Lin, YS & Wu, ML 2013, 10-Gbit/s on-chip optical interconnect module using silicon-based 45° micro-reflectors terminated polymer waveguides. 於 Technical Digest of the 18th Microoptics Conference, MOC 2013., 6715159, Technical Digest of the 18th Microoptics Conference, MOC 2013, 2013 18th Microoptics Conference, MOC 2013, Tokyo, Japan, 27/10/13.

10-Gbit/s on-chip optical interconnect module using silicon-based 45° micro-reflectors terminated polymer waveguides. / Zeng, Mao Yuan; Chen, Chin Ta; Shen, Po Kuan 等.
Technical Digest of the 18th Microoptics Conference, MOC 2013. 2013. 6715159 (Technical Digest of the 18th Microoptics Conference, MOC 2013).

研究成果: 書貢獻/報告類型 › 會議論文篇章 › 同行評審

TY - GEN

T1 - 10-Gbit/s on-chip optical interconnect module using silicon-based 45° micro-reflectors terminated polymer waveguides

AU - Zeng, Mao Yuan

AU - Chen, Chin Ta

AU - Shen, Po Kuan

AU - Liang, Kai

AU - Chang, Chia Chi

AU - Hsiao, Hsu Liang

AU - Lan, Hsiao Chin

AU - Lee, Yun Chih

AU - Lin, Yo Shen

AU - Wu, Mount Learn

PY - 2013

Y1 - 2013

N2 - In this paper, we propose a 10-Gbit/s optical interconnect module realized on the silicon optical bench (SiOB) using the silicon-based 45° micro-reflectors terminated the polymer waveguides. The silicon-based 45° micro-reflectors are fabricated on an orientation-defined (100) silicon substrate by using anisotropic chemical wet etching. The VCSEL and PD chips are assembled at the input and output ports of proposed module to demonstrate an out-of-plane optical coupling for the on-chip optical interconnects. The transmission efficiency of as high as -2.8 dB is experimentally obtained with a polymer-waveguide length of 0.5 cm. The clearly 10-Gbit/s electrical eye pattern is obtained and verifies that such a proposed module is suitable for the optical interconnects.

AB - In this paper, we propose a 10-Gbit/s optical interconnect module realized on the silicon optical bench (SiOB) using the silicon-based 45° micro-reflectors terminated the polymer waveguides. The silicon-based 45° micro-reflectors are fabricated on an orientation-defined (100) silicon substrate by using anisotropic chemical wet etching. The VCSEL and PD chips are assembled at the input and output ports of proposed module to demonstrate an out-of-plane optical coupling for the on-chip optical interconnects. The transmission efficiency of as high as -2.8 dB is experimentally obtained with a polymer-waveguide length of 0.5 cm. The clearly 10-Gbit/s electrical eye pattern is obtained and verifies that such a proposed module is suitable for the optical interconnects.

UR - http://www.scopus.com/inward/record.url?scp=84894167016&partnerID=8YFLogxK

M3 - 會議論文篇章

AN - SCOPUS:84894167016

SN - 9784863483453

T3 - Technical Digest of the 18th Microoptics Conference, MOC 2013

BT - Technical Digest of the 18th Microoptics Conference, MOC 2013

T2 - 2013 18th Microoptics Conference, MOC 2013

Y2 - 27 October 2013 through 30 October 2013

ER -

10-Gbit/s on-chip optical interconnect module using silicon-based 45° micro-reflectors terminated polymer waveguides

摘要

出版系列

???event.eventtypes.event.conference???

指紋

引用此