Wei, Z. J., Zhang, Y. C. & Chen, S. J., 20 6月 2021, 21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021.Institute of Electrical and Electronics Engineers Inc., p. 952-9554 p. (21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021).