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極紫外光高反射鏡光學鍍膜技術
Kuo, Chien-Cheng
(PI)
光電科學與工程學系
概覽
指紋
研究成果
(3)
指紋
探索此專案觸及的研究主題。這些標籤是根據基礎獎勵/補助款而產生。共同形成了獨特的指紋。
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Keyphrases
Plasma Polymerization
100%
X-ray
50%
Taiwan
50%
Reflectivity
50%
Water Vapor Barrier
50%
Calcium Assay
50%
Diffraction Grating
50%
Polycarbonate Substrate
50%
Organic-inorganic
50%
Superhydrophilic
50%
Barrier Thin Film
50%
High Efficiency
50%
Laser Damage Threshold
50%
Multilayer Thin Films
50%
Multilayer Dielectric
50%
Substrate Surface
50%
Radius of Curvature
50%
Plasma Bombardment
37%
Si Film
33%
Extreme Ultraviolet
33%
Aminosilane
25%
Hydrophilicity
25%
Ion Source
25%
Film Microstructure
16%
Capping Layer
16%
Ultraviolet Band
16%
Optical Coating Technology
16%
Film Stress
16%
High-reflective Mirror
16%
Environmental Stability
16%
Optical Coatings
16%
Interface Roughness
16%
Ion-assisted
16%
Coating Application
16%
Barrier Layer
16%
Dual Ion Beam Sputtering
16%
Ion Beam Sputtering
16%
Transverse Electric Polarization
16%
Manufacturing Process
16%
Working Pressure
16%
Photolithography
16%
Inorganic Encapsulation
16%
Semiconductors
16%
Sputtering System
16%
Substrate Bias
16%
Substrate Temperature
16%
Film Thickness
16%
Plasma-enhanced Chemical Vapor Deposition (PECVD)
16%
Spectrometry
16%
Optical Properties
16%
Gas Flow
16%
Film Structure
16%
Barrier Film
16%
Surface Profilometry
16%
Hexamethyldisiloxane (HMDSO)
16%
Network Structure
16%
Cage-like
16%
Inorganic Thin Film
16%
Physical Properties
16%
Monolayer Film
16%
Polyethylene Terephthalate
16%
Single-layer Film
16%
Organic Thin Films
16%
Polyethylene Terephthalate Substrate
16%
Ar/O2 Plasma
12%
Amine Group
12%
Plasma Current
12%
Superhydrophobicity
12%
Low Surface Energy
12%
Anode Voltage
12%
Self-cleaning
12%
Water Contact Angle
12%
Operating Time
12%
Substrate Roughness
12%
Cleaning Methods
12%
Surface Free Energy
12%
Antifogging
12%
Energy Characteristics
12%
Current-voltage
12%
Ion Bombardment
12%
Polaris
8%
Maximum Electric Field
8%
Al2O3 Oxide
8%
Al2O3 Layer
8%
COMSOL Multiphysics Software
8%
Transverse Magnetic
8%
Grating Structure
8%
Three-layer Structure
8%
Non-polarizing
8%
Grating
8%
Diffraction Efficiency
8%
Optical Applications
8%
Grating-based
8%
Transverse Magnetic Polarization
8%
Polarized Laser
8%
Silica
8%
Dielectric Mirror
8%
Finite Element Method
8%
SiO2 Layer
8%
High Power Laser
8%
Material Science
Plasma Polymerization
100%
Film
75%
Water Vapor
50%
Thin Films
50%
Dielectric Material
50%
Reflectivity
50%
Polycarbonate
50%
Silane
33%
Plating
33%
Optical Coating
33%
Coating Technology
16%
Anode
16%
Contact Angle
16%
Surface Energy
16%
Polymerization
16%
Surface Roughness
16%
Monolayers
12%
Polyethylene Terephthalate
12%
Silicon
10%
Aluminum Oxide
10%
Finite Element Method
10%
Al2O3
10%
Physical Property
6%
Optical Property
6%
Film Thickness
6%
Gas Flow
6%
Plasma-Enhanced Chemical Vapor Deposition
6%
Engineering
Polycarbonate
50%
Plasma Polymerization
50%
Bombardment
50%
Substrate Surface
50%
Reflectance
50%
Hydrophilicity
37%
Ion Source
25%
Substrate Bias
16%
Coating Application
16%
Ultraviolet Light
16%
Interface Temperature
16%
Manufacturing Process
16%
Optical Lithography
16%
Substrate Temperature
16%
Capping Layer
16%
Barrier Layer
16%
Energy Engineering
12%
Monomer
12%
Polymerization
12%
Water Contact Angle
12%
Anode Voltage
12%
Surface Free Energy
12%