以即時製程監控關鍵技術進行電漿輔助化學氣相沉積設備開發及製程最佳化

Engineering & Materials Science

1. Passivation 100%
2. Carrier lifetime 87%
3. Spectroscopic ellipsometry 49%
4. Plasma enhanced chemical vapor deposition 39%
5. Amorphous silicon 37%
6. Heterojunctions 35%
7. Dilution 30%
8. Structural properties 29%
9. Electric properties 29%
10. Solar cells 29%
11. Thin films 26%
12. Hydrogen 21%
13. Silicon 21%

Physics & Astronomy

1. passivity 76%
2. carrier lifetime 35%
3. chemical effects 21%
4. test equipment 17%
5. dilution 16%
6. ellipsometry 16%
7. amorphous silicon 15%
8. heterojunctions 14%
9. radio frequencies 14%
10. vapor deposition 12%
11. wafers 12%
12. solar cells 12%
13. electrical properties 12%
14. life (durability) 11%
15. hydrogen 10%
16. characterization 9%
17. silicon 8%
18. thin films 8%