X-ray scattering studies on InGaAs quantum dots

C. H. Hsu; H. Y. Lee; Y. W. Hsieh; Y. P. Stetsko; M. T. Tang; K. S. Liang; N. T. Yeh; J. I. Chyi; D. Y. Noh

doi:10.1016/S0921-4526(03)00276-X

X-ray scattering studies on InGaAs quantum dots

C. H. Hsu, H. Y. Lee, Y. W. Hsieh, Y. P. Stetsko, M. T. Tang, K. S. Liang, N. T. Yeh, J. I. Chyi, D. Y. Noh

Research output: Contribution to journal › Conference article › peer-review

11 Scopus citations

Abstract

We present a structural investigation of self-assembled InGaAs quantum dots on GaAs(001) substrates grown by molecular-beam epitaxy. The grazing incidence X-ray scattering measurements were performed at BL17B of Taiwan Light Source and BL12B2 of SPring-8. The strain field, composition distribution, and shape of the dots are determined. We found that In concentration was less than the nominal composition, 50% near the dot/substrate interface and exceeded 50% near the top of the dots, indicating In surface segregation. In addition, the relation between the strain and the composition did not obey Vegard's law.

Original language	English
Pages (from-to)	98-102
Number of pages	5
Journal	Physica B: Condensed Matter
Volume	336
Issue number	1-2
DOIs	https://doi.org/10.1016/S0921-4526(03)00276-X
State	Published - Aug 2003
Event	Proceedings of the 7th SXNS - Lake Tahoe, CA, United States Duration: 23 Sep 2002 → 27 Sep 2002

Keywords

Quantum dots
X-ray scattering

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10.1016/S0921-4526(03)00276-X

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title = "X-ray scattering studies on InGaAs quantum dots",

abstract = "We present a structural investigation of self-assembled InGaAs quantum dots on GaAs(001) substrates grown by molecular-beam epitaxy. The grazing incidence X-ray scattering measurements were performed at BL17B of Taiwan Light Source and BL12B2 of SPring-8. The strain field, composition distribution, and shape of the dots are determined. We found that In concentration was less than the nominal composition, 50% near the dot/substrate interface and exceeded 50% near the top of the dots, indicating In surface segregation. In addition, the relation between the strain and the composition did not obey Vegard's law.",

keywords = "Quantum dots, X-ray scattering",

author = "Hsu, {C. H.} and Lee, {H. Y.} and Hsieh, {Y. W.} and Stetsko, {Y. P.} and Tang, {M. T.} and Liang, {K. S.} and Yeh, {N. T.} and Chyi, {J. I.} and Noh, {D. Y.}",

note = "Funding Information: The work at SRRC was partially supported by the National Science Council of Republic of China under Contract No. NSC 91-2112-M-213-008. The work at NCU was supported by the National Science Council of Republic of China under Contract No. NSC 90-2215-E-008-037, and the Ministry of Education of Republic of China under the Program for Promoting Academic Excellence of Universities, 89-E-FA06-1-4.; Proceedings of the 7th SXNS ; Conference date: 23-09-2002 Through 27-09-2002",

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TY - JOUR

T1 - X-ray scattering studies on InGaAs quantum dots

AU - Hsu, C. H.

AU - Lee, H. Y.

AU - Hsieh, Y. W.

AU - Stetsko, Y. P.

AU - Tang, M. T.

AU - Liang, K. S.

AU - Yeh, N. T.

AU - Chyi, J. I.

AU - Noh, D. Y.

N1 - Funding Information: The work at SRRC was partially supported by the National Science Council of Republic of China under Contract No. NSC 91-2112-M-213-008. The work at NCU was supported by the National Science Council of Republic of China under Contract No. NSC 90-2215-E-008-037, and the Ministry of Education of Republic of China under the Program for Promoting Academic Excellence of Universities, 89-E-FA06-1-4.

PY - 2003/8

Y1 - 2003/8

N2 - We present a structural investigation of self-assembled InGaAs quantum dots on GaAs(001) substrates grown by molecular-beam epitaxy. The grazing incidence X-ray scattering measurements were performed at BL17B of Taiwan Light Source and BL12B2 of SPring-8. The strain field, composition distribution, and shape of the dots are determined. We found that In concentration was less than the nominal composition, 50% near the dot/substrate interface and exceeded 50% near the top of the dots, indicating In surface segregation. In addition, the relation between the strain and the composition did not obey Vegard's law.

AB - We present a structural investigation of self-assembled InGaAs quantum dots on GaAs(001) substrates grown by molecular-beam epitaxy. The grazing incidence X-ray scattering measurements were performed at BL17B of Taiwan Light Source and BL12B2 of SPring-8. The strain field, composition distribution, and shape of the dots are determined. We found that In concentration was less than the nominal composition, 50% near the dot/substrate interface and exceeded 50% near the top of the dots, indicating In surface segregation. In addition, the relation between the strain and the composition did not obey Vegard's law.

KW - Quantum dots

KW - X-ray scattering

UR - http://www.scopus.com/inward/record.url?scp=0037668969&partnerID=8YFLogxK

U2 - 10.1016/S0921-4526(03)00276-X

DO - 10.1016/S0921-4526(03)00276-X

M3 - 會議論文

AN - SCOPUS:0037668969

SN - 0921-4526

VL - 336

SP - 98

EP - 102

JO - Physica B: Condensed Matter

JF - Physica B: Condensed Matter

IS - 1-2

T2 - Proceedings of the 7th SXNS

Y2 - 23 September 2002 through 27 September 2002

ER -

X-ray scattering studies on InGaAs quantum dots

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Keywords

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