Wavelength-modulated standing-wave interferometry for small out-of-plane displacement measurement

Ju Yi Lee, Chia Tze Hung

Research output: Contribution to journalArticlepeer-review

1 Scopus citations


The incorporation of wavelength-modulated light into optical standing-wave interferometry is demonstrated for measuring small out-of-plane displacements. The optical standing-wave is generated by the superposition of the forward- and backward-propagating light beams, partially scattered by a single-layer nano-sphere scattering plate. The time-domain phase quadrature technique is used to detect and analyze the phase variation of the light scattered from the scattering plate for detecting small out-of-plane displacements. The experiments demonstrate the ability of the proposed method to measure out-of-plane displacements of several tens of micrometers with nanometric resolution. We also investigate periodic nonlinearity errors caused by changes in the modulation of the angular frequency and imperfect signals.

Original languageEnglish
Article number105967
JournalOptics and Laser Technology
StatePublished - Apr 2020


  • Out-of-plane displacement measurement
  • Standing-wave interferometer
  • Time-domain phase quadrature
  • Wavelength modulation


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