@inproceedings{da59e0aa983f4b27b9572283bc5ab854,
title = "Wavelength-modulated heterodyne speckle interferometry for displacement measurement",
abstract = "A heterodyne speckle interferometry for measurement of in-plane displacement is proposed. The wavelength-modulated (WM) laser beam passing through an unequal-path-length optical configuration is used as a heterodyne light source. The scattering heterodyne speckle signal is received by letting the WM heterodyne light incidents on the in-plane moving rough surface. The object displacement would be determined by the speckle interferometry theorem with the measured phase variation of the heterodyne speckle signal. The experimental results demonstrate that the measurement range is up to 10 μm and resolution is about 10 nm.",
keywords = "Heterodyne interferometry, In-plane displacement measurement, Laser diode, Optical metrology, Speckle interferometer, Wavelength-modulated",
author = "Lee, {Ju Yi} and Lin, {Kun Yi} and Huang, {Szu Han}",
year = "2009",
doi = "10.1117/12.827047",
language = "???core.languages.en_GB???",
isbn = "9780819476722",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
booktitle = "Optical Measurement Systems for Industrial Inspection VI",
note = "Optical Measurement Systems for Industrial Inspection VI ; Conference date: 15-06-2009 Through 18-06-2009",
}