Focal plane testing methods such as the Shack-Hartmann wavefront sensor and phase-shifting deflectometry are valuable tools for optical testing. In this study, we propose a novel wavefront slope testing method that uses a scanning galvo laser, in which a single-mode Gaussian beam scans the pupils of the tested optics in the system. In addition, the ray aberration is reconstructed by the four-step phase-shifting measurement by modulating the angular domain. The measured wavefront is verified by a Fizeau interferometer in terms of Zernike polynomials.
|State||Published - Oct 2015|