Wafer Defect Pattern Labeling and Recognition Using Semi-Supervised Learning

Katherine Shu Min Li, Xu Hao Jiang, Leon Li Yang Chen, Sying Jyan Wang, Andrew Yi Ann Huang, Jwu E. Chen, Hsing Chung Liang, Chun Lung Hsu

Research output: Contribution to journalArticlepeer-review

1 Scopus citations

Fingerprint

Dive into the research topics of 'Wafer Defect Pattern Labeling and Recognition Using Semi-Supervised Learning'. Together they form a unique fingerprint.

Physics & Astronomy

Engineering & Materials Science

Chemical Compounds