Vibration modulated subaperture stitching interferometry

Keyphrases

• Acquisition Method 50%
• Interferogram 50%
• Measurement Throughput 50%
• Mechanical Vibration 50%
• Motorized Stage 50%
• On the Fly 50%
• Optics 50%
• Phase Acquisition 50%
• Phase-shifting Algorithm 50%
• Positioning Accuracy 50%
• RMS Error 50%
• Rotary Scanning 50%
• Scanning Mechanism 50%
• Sub-aperture 100%
• Subaperture Stitching Interferometry 100%
• Surface Deformation 50%
• Symmetrical Axis 50%
• Vibration-induced 50%

Engineering

• Experimental Measurement 25%
• Interferogram 25%
• Interferometry 100%
• Mechanical Vibration 25%
• Rotational 25%
• Subaperture 100%
• Surface Deformation 25%

Physics

• Interferometry 100%
• Mechanical Vibration 33%
• Optics 33%