Vibration modulated subaperture stitching interferometry

Chao Wen Liang, Hung Sheng Chang, Po Chih Lin, Cheng Chung Lee, Yi Chun Chen

Research output: Contribution to journalArticlepeer-review

21 Scopus citations


A novel subaperture stitching interferometry is developed to measure the surface deformation of the lens by utilizing the mechanical vibration induced from a motorized stage. The interferograms of different subapertures are acquired on the fly while the tested optics is rotating against its symmetrical axis. The measurement throughput and the subaperture positioning accuracy are improved simultaneously by adopting both the synchronous rotational scanning mechanism and the non-uniform phase shifting algorithm. The experimental measurement shows the stitched phase RMS error of 0.0037 waves proving the feasibility of the proposed phase acquisition method.

Original languageEnglish
Pages (from-to)18255-18260
Number of pages6
JournalOptics Express
Issue number15
StatePublished - 29 Jul 2013


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