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Varying stress of SiOxCy thin films deposited by plasma polymerization
- Wei Bo Liao
- , Ya Chen Chang
- , Cheng Chung Jaing
- , Ching Long Cheng
- , Cheng Chung Lee
- , Hung Sen Wei
- , Chien Cheng Kuo
Research output: Contribution to journal › Article › peer-review
3
Scopus
citations