Vacuum measurement using total-internal-reflection heterodyne interferometry

Ming Horng Chiu, Ju Yi Lee, Der Chin Su, King Hung Lee

Research output: Contribution to journalArticlepeer-review

13 Scopus citations


Based on the effect that the phase difference between s- and p-polarizations at the total-internal-reflection is changed with the variation of the air refractive index, which is related to the air pressure, a new optical method for measuring the air pressure of a vacuum cavity is proposed. From the experimental curve of the phase difference variation measured by the heterodyne interferometry and the calibrated pressure measurement of a vacuum cavity, an empirical formula is derived. With this empirical formula, the measurable range of this new optical method is 760 to 0.1 torr.

Original languageEnglish
Pages (from-to)260-263
Number of pages4
JournalPrecision Engineering
Issue number4
StatePublished - Oct 1999


Dive into the research topics of 'Vacuum measurement using total-internal-reflection heterodyne interferometry'. Together they form a unique fingerprint.

Cite this