Abstract
Based on the effect that the phase difference between s- and p-polarizations at the total-internal-reflection is changed with the variation of the air refractive index, which is related to the air pressure, a new optical method for measuring the air pressure of a vacuum cavity is proposed. From the experimental curve of the phase difference variation measured by the heterodyne interferometry and the calibrated pressure measurement of a vacuum cavity, an empirical formula is derived. With this empirical formula, the measurable range of this new optical method is 760 to 0.1 torr.
| Original language | English |
|---|---|
| Pages (from-to) | 260-263 |
| Number of pages | 4 |
| Journal | Precision Engineering |
| Volume | 23 |
| Issue number | 4 |
| DOIs | |
| State | Published - Oct 1999 |