Using sio2 hard mask for fabrication of micro fresnel focusing lens for ultrasonic ejectors

Tuan Anh Bui, Min Chun Pan, Tzon Han Wu, Thanh Long Le

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

The fabrication of Fresnel focusing lenses operating at frequencies of 100 and 200 MHz was investigated in order to enhance the focusing efficiency of ultrasonic energy. The effects of process parameters on the four-level Fresnel lens profiles were discussed to find a most feasible fabrication procedure through these experiments. The quality of Fresnel lenses was improved when two-and three-mask processes using SiO2 film as the hard mask were employed. Besides, a better side-wall profile of Fresnel lens was obtained by using the three-mask process as compared to the two-mask one.

Original languageEnglish
Title of host publicationMaterials and Processing Technologies
EditorsThanh Nam Nguyen
PublisherTrans Tech Publications Ltd
Pages73-78
Number of pages6
ISBN (Print)9783035717143
DOIs
StatePublished - 2020
EventNational Conference on Mechanical Engineering and Manufacturing, NCMME 2019 - Ho Chi Minh, Viet Nam
Duration: 18 Oct 201920 Oct 2019

Publication series

NameKey Engineering Materials
Volume863 KEM
ISSN (Print)1013-9826
ISSN (Electronic)1662-9795

Conference

ConferenceNational Conference on Mechanical Engineering and Manufacturing, NCMME 2019
Country/TerritoryViet Nam
CityHo Chi Minh
Period18/10/1920/10/19

Keywords

  • Fresnel focusing lens
  • Micro fabrication
  • SiO hard mask
  • Ultrasonic ejectors

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