Ultra-large suspended graphene as a highly elastic membrane for capacitive pressure sensors

Yu Min Chen, Shih Ming He, Chi Hsien Huang, Cheng Chun Huang, Wen Pin Shih, Chun Lin Chu, Jing Kong, Ju Li, Ching Yuan Su

Research output: Contribution to journalArticlepeer-review

100 Scopus citations


In this work, we fabricate ultra-large suspended graphene membranes, where stacks of a few layers of graphene could be suspended over a circular hole with a diameter of up to 1.5 mm, with a diameter to thickness aspect ratio of 3 × 105, which is the record for free-standing graphene membranes. The process is based on large crystalline graphene (∼55 μm) obtained using a chemical vapor deposition (CVD) method, followed by a gradual solvent replacement technique. Combining a hydrogen bubbling transfer approach with thermal annealing to reduce polymer residue results in an extremely clean surface, where the ultra-large suspended graphene retains the intrinsic features of graphene, including phonon response and an enhanced carrier mobility (200% higher than that of graphene on a substrate). The highly elastic mechanical properties of the graphene membrane are demonstrated, and the Q-factor under 2 MHz stimulation is measured to be 200-300. A graphene-based capacitive pressure sensor is fabricated, where it shows a linear response and a high sensitivity of 15.15 aF Pa-1, which is 770% higher than that of frequently used silicon-based membranes. The reported approach is universal, which could be employed to fabricate other suspended 2D materials with macro-scale sizes on versatile support substrates, such as arrays of Si nano-pillars and deep trenches.

Original languageEnglish
Pages (from-to)3555-3564
Number of pages10
Issue number6
StatePublished - 14 Feb 2016


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