Two-dimensional nanoultrasonic imaging by using acoustic nanowaves

Kung Hsuan Lin, Cheng Ta Yu, Shih Ze Sun, Hung Ping Chen, Chang Chi Pan, Jen Inn Chyi, Sheng Wen Huang, Pai Chi Li, Chi Kuang Sun

Research output: Contribution to journalArticlepeer-review

35 Scopus citations

Abstract

Two-dimensional ultrasonic imaging is demonstrated by using acoustic nanowaves. With a 14 nm acoustic wavelength, both axial and transverse resolutions of a few tens of nanometers are thus achieved. This ultrasonic-based nondestructive technique not only images but also reconstructs the subsurface nanostructures including the depth positions of the buried interfaces. By demonstrating two-dimensional nanoultrasonic scans in depth and transverse (or z-x) axes, we show that acoustic nanowaves can be a promising tool for future subsurface three-dimensional noninvasive imaging with nanometer resolutions.

Original languageEnglish
Article number043106
JournalApplied Physics Letters
Volume89
Issue number4
DOIs
StatePublished - 2006

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