Turbulence-induced anomalous currents in RF magnetron plasmas

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Abstract

Large-amplitude density fluctuations are observed in a low-pressure RF magnetron discharge. The state of the discharge shows an abnormal behaviour which indicates the presence of anomalous charge transport in addition to the classical collisional transport. The coupling between the axial magnetic field and the electric field of the ionisation-drift turbulence gives rise to a cross-field electron drift, and in turn enhances the currents onto the magnetron electrode.

Original languageEnglish
Article number025
Pages (from-to)398-400
Number of pages3
JournalJournal of Physics D: Applied Physics
Volume20
Issue number3
DOIs
StatePublished - 1987

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