Transparent hard coatings deposited by a combined HIPIMS/CFUBMS deposition technique

Bo Huei Liao, Chien Nan Hsiao, Ming Hua Shiao, Sheng Hui Chen

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review


In this research, silicon nitride and silicon oxynitride films are prepared by a combined high-power impulse and closed field unbalanced magnetron sputtering (HIPIMS/CFUBMS) deposition technique. The average transmittance of the Si3N4 films on the glass in the visible range is 83.9 % and its hardness is 29.8 Gpa. After introducing 3 sccm O2 gas, the hardness of silicon oxynitride films decreases to 19 Gpa. However its average transmittance on the glass increases to 88.6 % in the visible range. Finally a 5-layer AR coating is deposited on one side glass. Its average transmittance is 93.2 % and its hardness is larger to 19 Gpa.

Original languageEnglish
Title of host publicationOptical Interference Coatings, OIC 2016
PublisherOptica Publishing Group (formerly OSA)
ISBN (Print)9781943580132
StatePublished - 2016
EventOptical Interference Coatings, OIC 2016 - Tucson, United States
Duration: 19 Jun 201624 Jun 2016

Publication series

NameOptics InfoBase Conference Papers
ISSN (Electronic)2162-2701


ConferenceOptical Interference Coatings, OIC 2016
Country/TerritoryUnited States


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