@inproceedings{fa93c75a53834faf97a8e7386a0aa6ab,
title = "Transparent hard coatings deposited by a combined HIPIMS/CFUBMS deposition technique",
abstract = "In this research, silicon nitride and silicon oxynitride films are prepared by a combined high-power impulse and closed field unbalanced magnetron sputtering (HIPIMS/CFUBMS) deposition technique. The average transmittance of the Si3N4 films on the glass in the visible range is 83.9 % and its hardness is 29.8 Gpa. After introducing 3 sccm O2 gas, the hardness of silicon oxynitride films decreases to 19 Gpa. However its average transmittance on the glass increases to 88.6 % in the visible range. Finally a 5-layer AR coating is deposited on one side glass. Its average transmittance is 93.2 % and its hardness is larger to 19 Gpa.",
author = "Liao, {Bo Huei} and Hsiao, {Chien Nan} and Shiao, {Ming Hua} and Chen, {Sheng Hui}",
note = "Publisher Copyright: {\textcopyright} OSA 2016.; null ; Conference date: 19-06-2016 Through 24-06-2016",
year = "2016",
doi = "10.1364/oic.2016.wa.9",
language = "???core.languages.en_GB???",
isbn = "9781943580132",
series = "Optics InfoBase Conference Papers",
publisher = "OSA - The Optical Society",
booktitle = "Optical Interference Coatings, OIC 2016",
}