Towards real-time methane (CH4) capture and detection by nanoparticle-enhanced silicon carbide trampoline oscillators

Zenghui Wang, Peng Wang, Jaesung Lee, Chung Chiun Liu, Philip X.L. Feng

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

This digest paper describes the initial efforts on real-time methane (CH4) capture and detection, by using silicon carbide (SiC) resonant microelectromechanical systems (MEMS) coated with SnO2 nanoparticles (NPs). The coating greatly boosts the active adsorption area, toward enhancing the capture. SiC tethered square trampoline devices coated with ultrathin SnO2 layers exhibit robust resonances in both vacuum and air, featuring large capturing area. Closed-loop oscillators with embedded SiC resonators enable fast, real-time readout of device responses upon exposure to CH4. An established electrochemical sensor is employed to verify the signature of CH4. SiC trampoline resonators are tested upon controlled CH4 flux in vacuum, and in atmospheric pressure with N2 carrier, demonstrating clear responses to CH4.

Original languageEnglish
Title of host publication2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages432-435
Number of pages4
ISBN (Electronic)9781479989553
DOIs
StatePublished - 5 Aug 2015
Event18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015 - Anchorage, United States
Duration: 21 Jun 201525 Jun 2015

Publication series

Name2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015

Conference

Conference18th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2015
Country/TerritoryUnited States
CityAnchorage
Period21/06/1525/06/15

Keywords

  • gas sensing
  • MEMS
  • methane (CH) capture and detection
  • nanoparticle (NP)
  • oscillator
  • resonator
  • silicon carbide (SiC)
  • surface adsorption
  • tin dioxide (SnO)

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