Three-dimensional plasmon resonance device fabricated by auto-cloning deposition and atomic layer deposition

Shih Hao Chan, Chien Cheng Kuo, Cheng Chung Lee, Sheng Hui Chen

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

Three-dimensional plasmon resonance device has been fabricated by using auto-cloning technique and atomic layer deposition methods. The device is based on a metal-insulator-metal rectenna circuit. The power conversion efficiencies of the device were about 1.3×10-3.

Original languageEnglish
Title of host publicationOptical Interference Coatings, OIC 2016
PublisherOptica Publishing Group (formerly OSA)
ISBN (Print)9781943580132
DOIs
StatePublished - 2016
EventOptical Interference Coatings, OIC 2016 - Tucson, United States
Duration: 19 Jun 201624 Jun 2016

Publication series

NameOptics InfoBase Conference Papers
ISSN (Electronic)2162-2701

Conference

ConferenceOptical Interference Coatings, OIC 2016
Country/TerritoryUnited States
CityTucson
Period19/06/1624/06/16

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