Thermoelectric Devices by Half-Millimeter-Long Silicon Nanowires Arrays

Cheng Lun Hsin, Meng Hsin Wu, Wei Chieh Wang

Research output: Contribution to journalArticlepeer-review

15 Scopus citations


Waste heat scavenging and IC hot spot cooling have been important topics of investigation for many decades. In this study, a novel sub-millimeter silicide/Si nanowires/Ag paste thermoelectric device is fabricated and its thermoelectric properties from 25 to 200 °C are studied. Polyimide packaging between the nanowires was used to enhance the mechanical strength of the device. The figure of merit of n-type and p-type device reached ∼0.25 and 0.21 at 200 °C, respectively, demonstrating 5 times enhancement on the ZT value compared with Si. Our experimental results prove that this method provides a cost-effective approach to fabricate thermoelectric nanodevices for future thermoelectric applications without traditional powder milling and sintering processes.

Original languageEnglish
Article number8826445
Pages (from-to)921-924
Number of pages4
JournalIEEE Transactions on Nanotechnology
StatePublished - 2019


  • Si nanowires
  • Thermoelectric devices
  • figure of merit ZT
  • metal assisted chemical etching
  • polyimide packaging


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