Thermal expansion coefficient analysis by Fabry-Pérot interferometer

Hung Ta Shih; Yung Cheng Wang; Pi Cheng Tung; Lih Horng Shyu; Chung Ping Chang; Jhe Sian Li

Thermal expansion coefficient analysis by Fabry-Pérot interferometer

Hung Ta Shih, Yung Cheng Wang, Pi Cheng Tung, Lih Horng Shyu, Chung Ping Chang, Jhe Sian Li

Department of Mechanical Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Abstract

In this study, an interferometer measurement module which has the capability to determine the thermal expansion coefficient of the linear translation aluminum alloy stage for the linear displacement is proposed. This structure consists of two Fabry-Pérot interferometers installed on the stage at different positions for investigating the thermal effect. In the optical arrangement, Fabry-Pérot optical cavity is composed of two plane mirrors and a charge-coupled device(CCD) for inspecting the swept interference fringes induced by the temperature drift. In addition, the constructed measurement module possesses compact optical structure and optimal analysis method. For the high precision laser system, it can provide an estimation for the displacement measurement during the temperature change of six degrees.

Original language	English
Title of host publication	European Society for Precision Engineering and Nanotechnology, Conference Proceedings - 19th International Conference and Exhibition, EUSPEN 2019
Editors	Richard K. Leach, D. Billington, C. Nisbet, D. Phillips
Publisher	euspen
Pages	298-299
Number of pages	2
ISBN (Electronic)	9780995775145
State	Published - 2019
Event	19th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2019 - Bilbao, Spain Duration: 3 Jun 2019 → 7 Jun 2019

Publication series

Name	European Society for Precision Engineering and Nanotechnology, Conference Proceedings - 19th International Conference and Exhibition, EUSPEN 2019

Conference

Conference	19th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2019
Country/Territory	Spain
City	Bilbao
Period	3/06/19 → 7/06/19

Keywords

Fabry-Pérot interferometer
Interference fringe
Thermal expansion coefficient

Cite this

Shih, H. T., Wang, Y. C., Tung, P. C., Shyu, L. H., Chang, C. P., & Li, J. S. (2019). Thermal expansion coefficient analysis by Fabry-Pérot interferometer. In R. K. Leach, D. Billington, C. Nisbet, & D. Phillips (Eds.), European Society for Precision Engineering and Nanotechnology, Conference Proceedings - 19th International Conference and Exhibition, EUSPEN 2019 (pp. 298-299). (European Society for Precision Engineering and Nanotechnology, Conference Proceedings - 19th International Conference and Exhibition, EUSPEN 2019). euspen.

Shih, Hung Ta ; Wang, Yung Cheng ; Tung, Pi Cheng et al. / Thermal expansion coefficient analysis by Fabry-Pérot interferometer. European Society for Precision Engineering and Nanotechnology, Conference Proceedings - 19th International Conference and Exhibition, EUSPEN 2019. editor / Richard K. Leach ; D. Billington ; C. Nisbet ; D. Phillips. euspen, 2019. pp. 298-299 (European Society for Precision Engineering and Nanotechnology, Conference Proceedings - 19th International Conference and Exhibition, EUSPEN 2019).

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abstract = "In this study, an interferometer measurement module which has the capability to determine the thermal expansion coefficient of the linear translation aluminum alloy stage for the linear displacement is proposed. This structure consists of two Fabry-P{\'e}rot interferometers installed on the stage at different positions for investigating the thermal effect. In the optical arrangement, Fabry-P{\'e}rot optical cavity is composed of two plane mirrors and a charge-coupled device(CCD) for inspecting the swept interference fringes induced by the temperature drift. In addition, the constructed measurement module possesses compact optical structure and optimal analysis method. For the high precision laser system, it can provide an estimation for the displacement measurement during the temperature change of six degrees.",

keywords = "Fabry-P{\'e}rot interferometer, Interference fringe, Thermal expansion coefficient",

author = "Shih, {Hung Ta} and Wang, {Yung Cheng} and Tung, {Pi Cheng} and Shyu, {Lih Horng} and Chang, {Chung Ping} and Li, {Jhe Sian}",

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Shih, HT, Wang, YC, Tung, PC, Shyu, LH, Chang, CP & Li, JS 2019, Thermal expansion coefficient analysis by Fabry-Pérot interferometer. in RK Leach, D Billington, C Nisbet & D Phillips (eds), European Society for Precision Engineering and Nanotechnology, Conference Proceedings - 19th International Conference and Exhibition, EUSPEN 2019. European Society for Precision Engineering and Nanotechnology, Conference Proceedings - 19th International Conference and Exhibition, EUSPEN 2019, euspen, pp. 298-299, 19th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2019, Bilbao, Spain, 3/06/19.

Thermal expansion coefficient analysis by Fabry-Pérot interferometer. / Shih, Hung Ta; Wang, Yung Cheng; Tung, Pi Cheng et al.
European Society for Precision Engineering and Nanotechnology, Conference Proceedings - 19th International Conference and Exhibition, EUSPEN 2019. ed. / Richard K. Leach; D. Billington; C. Nisbet; D. Phillips. euspen, 2019. p. 298-299 (European Society for Precision Engineering and Nanotechnology, Conference Proceedings - 19th International Conference and Exhibition, EUSPEN 2019).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - Thermal expansion coefficient analysis by Fabry-Pérot interferometer

AU - Shih, Hung Ta

AU - Wang, Yung Cheng

AU - Tung, Pi Cheng

AU - Shyu, Lih Horng

AU - Chang, Chung Ping

AU - Li, Jhe Sian

PY - 2019

Y1 - 2019

N2 - In this study, an interferometer measurement module which has the capability to determine the thermal expansion coefficient of the linear translation aluminum alloy stage for the linear displacement is proposed. This structure consists of two Fabry-Pérot interferometers installed on the stage at different positions for investigating the thermal effect. In the optical arrangement, Fabry-Pérot optical cavity is composed of two plane mirrors and a charge-coupled device(CCD) for inspecting the swept interference fringes induced by the temperature drift. In addition, the constructed measurement module possesses compact optical structure and optimal analysis method. For the high precision laser system, it can provide an estimation for the displacement measurement during the temperature change of six degrees.

AB - In this study, an interferometer measurement module which has the capability to determine the thermal expansion coefficient of the linear translation aluminum alloy stage for the linear displacement is proposed. This structure consists of two Fabry-Pérot interferometers installed on the stage at different positions for investigating the thermal effect. In the optical arrangement, Fabry-Pérot optical cavity is composed of two plane mirrors and a charge-coupled device(CCD) for inspecting the swept interference fringes induced by the temperature drift. In addition, the constructed measurement module possesses compact optical structure and optimal analysis method. For the high precision laser system, it can provide an estimation for the displacement measurement during the temperature change of six degrees.

KW - Fabry-Pérot interferometer

KW - Interference fringe

KW - Thermal expansion coefficient

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BT - European Society for Precision Engineering and Nanotechnology, Conference Proceedings - 19th International Conference and Exhibition, EUSPEN 2019

A2 - Leach, Richard K.

A2 - Billington, D.

A2 - Nisbet, C.

A2 - Phillips, D.

PB - euspen

T2 - 19th International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2019

Y2 - 3 June 2019 through 7 June 2019

ER -

Shih HT, Wang YC, Tung PC, Shyu LH, Chang CP, Li JS. Thermal expansion coefficient analysis by Fabry-Pérot interferometer. In Leach RK, Billington D, Nisbet C, Phillips D, editors, European Society for Precision Engineering and Nanotechnology, Conference Proceedings - 19th International Conference and Exhibition, EUSPEN 2019. euspen. 2019. p. 298-299. (European Society for Precision Engineering and Nanotechnology, Conference Proceedings - 19th International Conference and Exhibition, EUSPEN 2019).

Thermal expansion coefficient analysis by Fabry-Pérot interferometer

Abstract

Publication series

Conference

Keywords

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