Theoretical modeling and fabrication of two-dimensional microstructures by using micro-anode-guided electroplating with real-time image processing

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

4 Scopus citations

Abstract

the purpose of this research was to develop a new micro-anode-guided electroplating (MAGE) system equipped by an image-guided positioning controller, to fabricate two-dimensional microstructures. From real-time image, the relative positions of the micro-anode and the microstructures tip can be located and maintained. When the relative position is adjusted, the deposition direction of the microstructures can be controllable and microstructures with different geometries can be fabricated. Moreover, the results of experiment can be explained by the distribution of electro field strength simulated by Comsol Multiphysics 4.2.

Original languageEnglish
Title of host publicationRecent Development in Machining, Materials and Mechanical Technologies
EditorsJyh-Chen Chen, Usuki Hiroshi, Sheng-Wei Lee, Yiin-Kuen Fuh
PublisherTrans Tech Publications Ltd
Pages604-614
Number of pages11
ISBN (Print)9783038354956
DOIs
StatePublished - 2015
EventInternational Conference on Machining, Materials and Mechanical Technologies, IC3MT 2014 - Taipei City, Taiwan
Duration: 31 Aug 20145 Sep 2014

Publication series

NameKey Engineering Materials
Volume656-657
ISSN (Print)1013-9826
ISSN (Electronic)1662-9795

Conference

ConferenceInternational Conference on Machining, Materials and Mechanical Technologies, IC3MT 2014
Country/TerritoryTaiwan
CityTaipei City
Period31/08/145/09/14

Keywords

  • Localized electrochemical deposition (LECD)
  • Micro-anode-guided electroplating (MAGE)
  • Simulation of electro field strength

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