@inproceedings{dd199cc2c4af448ba61f30b4f76822c0,
title = "The suppression effect of 830 nm laser irradiation on porous silicon formation",
abstract = "The suppression effect of 830 nm laser irradiation on the formation porous layer p-Type silicon in hydrofluoric (HF) acidbased electrolyte has been investigated. With laser irradiation at 5.0 mW, the porous silicon layer is only few nanometers. We believe the electrochemical reaction on the laser-irradiated surface is suppressed by the laser power because of the induction of the depletion region. In the study, it is shown that the thickness of the porous silicon layer depends on the intensity of the laser power at a fixed irradiation time.",
author = "Chiang, {C. C.} and Huang, {Y. C.} and Juan, {P. C.} and Lo, {F. S.} and Lee, {T. H.}",
note = "Publisher Copyright: {\textcopyright} The Electrochemical Society.; Symposium on Nanoscale Electrochemistry - 228th ECS Meeting ; Conference date: 11-10-2015 Through 15-10-2015",
year = "2015",
doi = "10.1149/06935.0001ecst",
language = "???core.languages.en_GB???",
series = "ECS Transactions",
publisher = "Electrochemical Society Inc.",
number = "35",
pages = "1--7",
editor = "T. Ito and A. Kusoglu",
booktitle = "Nanoscale Electrochemistry",
edition = "35",
}