The rapid fabrication process for guided-mode resonance filter

Ting Jou Ding; Jiann Hwa Lue; Tsung Hsun Yang; Chien Chieh Lee; Sheng Fu Lin; Jenq Yang Chang

doi:10.1109/NEMS.2011.6017575

The rapid fabrication process for guided-mode resonance filter

Ting Jou Ding, Jiann Hwa Lue, Tsung Hsun Yang, Chien Chieh Lee, Sheng Fu Lin, Jenq Yang Chang

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

1 Scopus citations

Abstract

The experimental process and results by using non-UV soft lithography method to fabricate thin-film optical guided-mode resonance (GMR) filter, are reported. The parameter stably and high through put 1-D sub-micrometer periodic optical elements are obtained by Embossing technique. The guided-mode resonance filter is taken to demonstrating. Experimental result shows the period of the fabricated filter is about 928nm and the transmittance spectrum of resonance wavelength is approximately 57%.

Original language	English
Title of host publication	NEMS 2011 - 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems
Pages	1212-1215
Number of pages	4
DOIs	https://doi.org/10.1109/NEMS.2011.6017575
State	Published - 2011
Event	6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2011 - Kaohsiung, Taiwan Duration: 20 Feb 2011 → 23 Feb 2011

Publication series

Name	NEMS 2011 - 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems

Conference

Conference	6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2011
Country/Territory	Taiwan
City	Kaohsiung
Period	20/02/11 → 23/02/11

Keywords

Grating
Guided-mode resonance
Soft lithography
Sol-Ge
Subwavelength

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10.1109/NEMS.2011.6017575

Cite this

Ding, T. J., Lue, J. H., Yang, T. H., Lee, C. C., Lin, S. F., & Chang, J. Y. (2011). The rapid fabrication process for guided-mode resonance filter. In NEMS 2011 - 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (pp. 1212-1215). Article 6017575 (NEMS 2011 - 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems). https://doi.org/10.1109/NEMS.2011.6017575

@inproceedings{0ae91951f0034e3896402c7553793cb6,

title = "The rapid fabrication process for guided-mode resonance filter",

abstract = "The experimental process and results by using non-UV soft lithography method to fabricate thin-film optical guided-mode resonance (GMR) filter, are reported. The parameter stably and high through put 1-D sub-micrometer periodic optical elements are obtained by Embossing technique. The guided-mode resonance filter is taken to demonstrating. Experimental result shows the period of the fabricated filter is about 928nm and the transmittance spectrum of resonance wavelength is approximately 57%.",

keywords = "Grating, Guided-mode resonance, Soft lithography, Sol-Ge, Subwavelength",

author = "Ding, {Ting Jou} and Lue, {Jiann Hwa} and Yang, {Tsung Hsun} and Lee, {Chien Chieh} and Lin, {Sheng Fu} and Chang, {Jenq Yang}",

year = "2011",

doi = "10.1109/NEMS.2011.6017575",

language = "???core.languages.en_GB???",

isbn = "9781612847757",

series = "NEMS 2011 - 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems",

pages = "1212--1215",

booktitle = "NEMS 2011 - 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems",

note = "6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2011 ; Conference date: 20-02-2011 Through 23-02-2011",

}

Ding, TJ, Lue, JH, Yang, TH , Lee, CC, Lin, SF & Chang, JY 2011, The rapid fabrication process for guided-mode resonance filter. in NEMS 2011 - 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems., 6017575, NEMS 2011 - 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, pp. 1212-1215, 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2011, Kaohsiung, Taiwan, 20/02/11. https://doi.org/10.1109/NEMS.2011.6017575

The rapid fabrication process for guided-mode resonance filter. / Ding, Ting Jou; Lue, Jiann Hwa; Yang, Tsung Hsun et al.
NEMS 2011 - 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems. 2011. p. 1212-1215 6017575 (NEMS 2011 - 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - The rapid fabrication process for guided-mode resonance filter

AU - Ding, Ting Jou

AU - Lue, Jiann Hwa

AU - Yang, Tsung Hsun

AU - Lee, Chien Chieh

AU - Lin, Sheng Fu

AU - Chang, Jenq Yang

PY - 2011

Y1 - 2011

N2 - The experimental process and results by using non-UV soft lithography method to fabricate thin-film optical guided-mode resonance (GMR) filter, are reported. The parameter stably and high through put 1-D sub-micrometer periodic optical elements are obtained by Embossing technique. The guided-mode resonance filter is taken to demonstrating. Experimental result shows the period of the fabricated filter is about 928nm and the transmittance spectrum of resonance wavelength is approximately 57%.

AB - The experimental process and results by using non-UV soft lithography method to fabricate thin-film optical guided-mode resonance (GMR) filter, are reported. The parameter stably and high through put 1-D sub-micrometer periodic optical elements are obtained by Embossing technique. The guided-mode resonance filter is taken to demonstrating. Experimental result shows the period of the fabricated filter is about 928nm and the transmittance spectrum of resonance wavelength is approximately 57%.

KW - Grating

KW - Guided-mode resonance

KW - Soft lithography

KW - Sol-Ge

KW - Subwavelength

UR - http://www.scopus.com/inward/record.url?scp=80053300484&partnerID=8YFLogxK

U2 - 10.1109/NEMS.2011.6017575

DO - 10.1109/NEMS.2011.6017575

M3 - 會議論文篇章

AN - SCOPUS:80053300484

SN - 9781612847757

T3 - NEMS 2011 - 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems

SP - 1212

EP - 1215

BT - NEMS 2011 - 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems

T2 - 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2011

Y2 - 20 February 2011 through 23 February 2011

ER -

The rapid fabrication process for guided-mode resonance filter

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