The plasma diagnosis by optical emission spectroscopy for the study of phosphorus doped nanocrystalline silicone film growth

Hsiang Chih Yu, Yu Lin Hsieh, Chia Cheng Lu, Chien Chieh Lee, Jenq Yang Chang, I. Chen Chen, Tomi T. Li

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

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Keyphrases

Material Science

Engineering

Physics