@inproceedings{8109139804754d0789693b22fba9d34f,
title = "The multi-segment adaptive control of the high temperature heat source in a MOCVD vacuum reactor",
abstract = "This research focuses on the adaptive control for a high temperature heat source. The significant characteristic of adaptive control is self-regulation. The adaptive control is very important in a MOCVD process since different parameter values to control temperature in each temperature step are required. Simulations and experiments are performed to verify the feasibility of the proposed control scheme for the MOCVD process. The simulation results are compared with those of the experiment. The results show that the steady-state error in proportional-integral (PI) control is about 3°C, and in adaptive control is 0.3°C. It can be found that the performance of the adaptive control is much better than that of the traditional PI control which is commonly used in industry.",
keywords = "Adaptive control, Heater, MOCVD Reactor, Susceptor, Temperature control",
author = "Chiu, {Jung Ching} and Hu, {Chih Kai} and Tung, {Pi Cheng} and Li, {Tomi T.}",
note = "Publisher Copyright: {\textcopyright} 2017 IEEE.; 2017 China Semiconductor Technology International Conference, CSTIC 2017 ; Conference date: 12-03-2017 Through 13-03-2017",
year = "2017",
month = may,
day = "4",
doi = "10.1109/CSTIC.2017.7919902",
language = "???core.languages.en_GB???",
series = "China Semiconductor Technology International Conference 2017, CSTIC 2017",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
editor = "Steve Liang and Ying Shi and Ru Huang and Qinghuang Lin and David Huang and Hanming Wu and Yuchun Wang and Cor Claeys and Kafai Lai and Ying Zhang and Peilin Song and Viyu Shi and Zhen Guo",
booktitle = "China Semiconductor Technology International Conference 2017, CSTIC 2017",
}