Fingerprint
Dive into the research topics of 'The influence of stress on the growth of titanium silicide thin films on (001) silicon substrates'. Together they form a unique fingerprint.- Sort by
- Weight
- Alphabetically
The influence of stress on the growth of titanium silicide thin films on (001) silicon substrates
S. L. Cheng, S. M. Chang, H. Y. Huang, Y. C. Peng, L. J. Chen, B. Y. Tsui, C. J. Tsai, S. S. Guo
Research output: Contribution to journal › Conference article › peer-review