@inproceedings{0912814b3b2c42a68e3cebc493869899,
title = "The influence of hydrogen on the properties of Al and Ga doped ZnO films at low temperature",
abstract = "Low resistivity and high transmittance of Al-doped ZnO and Ga-doped ZnO transparent conductive thin films have been achieved by a pulsed DC magnetron sputtering in various hydrogen ambient at low temperature.",
author = "Li, {Meng Chi} and Kuo, {Chien Cheng} and Peng, {Ssu Hsiang} and Chen, {Sheng Hui} and Lee, {Cheng Chung}",
year = "2010",
doi = "10.1364/oic.2010.mc6",
language = "???core.languages.en_GB???",
isbn = "9781557528919",
series = "Optics InfoBase Conference Papers",
publisher = "Optical Society of America (OSA)",
booktitle = "Optical Interference Coatings, OIC 2010",
note = "Optical Interference Coatings, OIC 2010 ; Conference date: 06-06-2010 Through 11-06-2010",
}