The influence of hydrogen on the properties of Al and Ga doped ZnO films at low temperature

Meng Chi Li, Chien Cheng Kuo, Ssu Hsiang Peng, Sheng Hui Chen, Cheng Chung Lee

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

Low resistivity and high transmittance of Al-doped ZnO and Ga-doped ZnO transparent conductive thin films have been achieved by a pulsed DC magnetron sputtering in various hydrogen ambient at low temperature.

Original languageEnglish
Title of host publicationOptical Interference Coatings, OIC 2010
PublisherOptical Society of America (OSA)
ISBN (Print)9781557528919
DOIs
StatePublished - 2010
EventOptical Interference Coatings, OIC 2010 - Tucson, AZ, United States
Duration: 6 Jun 201011 Jun 2010

Publication series

NameOptics InfoBase Conference Papers
ISSN (Electronic)2162-2701

Conference

ConferenceOptical Interference Coatings, OIC 2010
Country/TerritoryUnited States
CityTucson, AZ
Period6/06/1011/06/10

Fingerprint

Dive into the research topics of 'The influence of hydrogen on the properties of Al and Ga doped ZnO films at low temperature'. Together they form a unique fingerprint.

Cite this