The growth of SiGe quantum rings in Au thin films on epitaxial SiGe on silicon

J. H. He; Y. L. Chueh; W. W. Wu; S. W. Lee; L. J. Chen; L. J. Chou

doi:10.1016/j.tsf.2004.06.179

The growth of SiGe quantum rings in Au thin films on epitaxial SiGe on silicon

J. H. He, Y. L. Chueh, W. W. Wu, S. W. Lee, L. J. Chen, L. J. Chou

Graduate Institute of Materials Science and Engineering

Research output: Contribution to journal › Article › peer-review

10 Scopus citations

Abstract

Self-assembled SiGe quantum rings (QRs) on Si_0.8Ge_0.2 substrate has been formed by thermal annealing of the samples with capping Au thin films at 1100°C in N₂ ambient. Miniature quantum rings have a narrow distribution of diameter and height of 27.9±1.7 and 1.53±0.10 run, respectively. The formation of quantum rings was found to be mediated by the Au nanoparticles. As the size of Au nanoparticles can be adjusted, the method promises to be an effective technique to produce high density, uniform in size quantum rings.

Original language	English
Pages (from-to)	478-482
Number of pages	5
Journal	Thin Solid Films
Volume	469-470
Issue number	SPEC. ISS.
DOIs	https://doi.org/10.1016/j.tsf.2004.06.179
State	Published - 22 Dec 2004

Keywords

Nanorings
Quantum rings
Self-assembly
SiGe

Access to Document

10.1016/j.tsf.2004.06.179

Cite this

@article{105935cae4fc4dd5b551bf9202563d69,

title = "The growth of SiGe quantum rings in Au thin films on epitaxial SiGe on silicon",

abstract = "Self-assembled SiGe quantum rings (QRs) on Si0.8Ge0.2 substrate has been formed by thermal annealing of the samples with capping Au thin films at 1100°C in N2 ambient. Miniature quantum rings have a narrow distribution of diameter and height of 27.9±1.7 and 1.53±0.10 run, respectively. The formation of quantum rings was found to be mediated by the Au nanoparticles. As the size of Au nanoparticles can be adjusted, the method promises to be an effective technique to produce high density, uniform in size quantum rings.",

keywords = "Nanorings, Quantum rings, Self-assembly, SiGe",

author = "He, {J. H.} and Chueh, {Y. L.} and Wu, {W. W.} and Lee, {S. W.} and Chen, {L. J.} and Chou, {L. J.}",

note = "Funding Information: The research is supported by the Republic of China National Science Council Grant No. NSC 92-2215-E-007-003 and Ministry of Education Grant No. 91-E-FA04-1-4.",

year = "2004",

month = dec,

day = "22",

doi = "10.1016/j.tsf.2004.06.179",

language = "???core.languages.en_GB???",

volume = "469-470",

pages = "478--482",

journal = "Thin Solid Films",

issn = "0040-6090",

number = "SPEC. ISS.",

}

TY - JOUR

T1 - The growth of SiGe quantum rings in Au thin films on epitaxial SiGe on silicon

AU - He, J. H.

AU - Chueh, Y. L.

AU - Wu, W. W.

AU - Lee, S. W.

AU - Chen, L. J.

AU - Chou, L. J.

N1 - Funding Information: The research is supported by the Republic of China National Science Council Grant No. NSC 92-2215-E-007-003 and Ministry of Education Grant No. 91-E-FA04-1-4.

PY - 2004/12/22

Y1 - 2004/12/22

N2 - Self-assembled SiGe quantum rings (QRs) on Si0.8Ge0.2 substrate has been formed by thermal annealing of the samples with capping Au thin films at 1100°C in N2 ambient. Miniature quantum rings have a narrow distribution of diameter and height of 27.9±1.7 and 1.53±0.10 run, respectively. The formation of quantum rings was found to be mediated by the Au nanoparticles. As the size of Au nanoparticles can be adjusted, the method promises to be an effective technique to produce high density, uniform in size quantum rings.

AB - Self-assembled SiGe quantum rings (QRs) on Si0.8Ge0.2 substrate has been formed by thermal annealing of the samples with capping Au thin films at 1100°C in N2 ambient. Miniature quantum rings have a narrow distribution of diameter and height of 27.9±1.7 and 1.53±0.10 run, respectively. The formation of quantum rings was found to be mediated by the Au nanoparticles. As the size of Au nanoparticles can be adjusted, the method promises to be an effective technique to produce high density, uniform in size quantum rings.

KW - Nanorings

KW - Quantum rings

KW - Self-assembly

KW - SiGe

UR - http://www.scopus.com/inward/record.url?scp=10044223282&partnerID=8YFLogxK

U2 - 10.1016/j.tsf.2004.06.179

DO - 10.1016/j.tsf.2004.06.179

M3 - 期刊論文

AN - SCOPUS:10044223282

SN - 0040-6090

VL - 469-470

SP - 478

EP - 482

JO - Thin Solid Films

JF - Thin Solid Films

IS - SPEC. ISS.

ER -

The growth of SiGe quantum rings in Au thin films on epitaxial SiGe on silicon

Abstract

Keywords

Access to Document

Fingerprint

Cite this