The fabrication of 3D aspherical silicon microlenses using a shadow mask

J. Zhu; S. J. Chen; C. Y. Lin; J. Oiler; H. Wang; Y. C. Chen; H. Yu

doi:10.1109/TRANSDUCERS.2011.5969562

The fabrication of 3D aspherical silicon microlenses using a shadow mask

J. Zhu, S. J. Chen, C. Y. Lin, J. Oiler, H. Wang, Y. C. Chen, H. Yu

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

1 Scopus citations

Abstract

This work explores a new technique for 3D aspherical Si microlens fabrication using a shadow mask. With the shadow mask, a convex aspherical SiO ₂ layer is sputter deposited on a Si wafer due to the anisotropy of deposition. The shape of the SiO ₂ is transferred to Si by DRIE to form the aspherical microlens. Microlenses with controllable apertures (0.4μmm - 2mm in diameter) and focal lengths (1mm - 12mm) can be fabricated using this simple, mass-production compatible and cost-effective method. The optical simulation verified the focal effect of the lens, which can be applied to infrared optics. Furthermore, a self-focusing acoustic transducer is fabricated using the Si microlens as a mold, providing potential good self-focusing effect for actuations and sensing.

Original language	English
Title of host publication	2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11
Pages	2370-2373
Number of pages	4
DOIs	https://doi.org/10.1109/TRANSDUCERS.2011.5969562
State	Published - 2011
Event	2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11 - Beijing, China Duration: 5 Jun 2011 → 9 Jun 2011

Publication series

Name	2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11

Conference

Conference	2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11
Country/Territory	China
City	Beijing
Period	5/06/11 → 9/06/11

Keywords

Acoustic transducer
Infrared optics
Microlens
Shadow mask

Access to Document

10.1109/TRANSDUCERS.2011.5969562

Cite this

Zhu, J., Chen, S. J., Lin, C. Y., Oiler, J., Wang, H., Chen, Y. C., & Yu, H. (2011). The fabrication of 3D aspherical silicon microlenses using a shadow mask. In 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11 (pp. 2370-2373). Article 5969562 (2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11). https://doi.org/10.1109/TRANSDUCERS.2011.5969562

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title = "The fabrication of 3D aspherical silicon microlenses using a shadow mask",

abstract = "This work explores a new technique for 3D aspherical Si microlens fabrication using a shadow mask. With the shadow mask, a convex aspherical SiO 2 layer is sputter deposited on a Si wafer due to the anisotropy of deposition. The shape of the SiO 2 is transferred to Si by DRIE to form the aspherical microlens. Microlenses with controllable apertures (0.4μmm - 2mm in diameter) and focal lengths (1mm - 12mm) can be fabricated using this simple, mass-production compatible and cost-effective method. The optical simulation verified the focal effect of the lens, which can be applied to infrared optics. Furthermore, a self-focusing acoustic transducer is fabricated using the Si microlens as a mold, providing potential good self-focusing effect for actuations and sensing.",

keywords = "Acoustic transducer, Infrared optics, Microlens, Shadow mask",

author = "J. Zhu and Chen, {S. J.} and Lin, {C. Y.} and J. Oiler and H. Wang and Chen, {Y. C.} and H. Yu",

year = "2011",

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booktitle = "2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11",

note = "2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11 ; Conference date: 05-06-2011 Through 09-06-2011",

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Zhu, J, Chen, SJ, Lin, CY, Oiler, J, Wang, H, Chen, YC & Yu, H 2011, The fabrication of 3D aspherical silicon microlenses using a shadow mask. in 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11., 5969562, 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11, pp. 2370-2373, 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11, Beijing, China, 5/06/11. https://doi.org/10.1109/TRANSDUCERS.2011.5969562

The fabrication of 3D aspherical silicon microlenses using a shadow mask. / Zhu, J.; Chen, S. J.; Lin, C. Y. et al.
2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11. 2011. p. 2370-2373 5969562 (2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

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N2 - This work explores a new technique for 3D aspherical Si microlens fabrication using a shadow mask. With the shadow mask, a convex aspherical SiO 2 layer is sputter deposited on a Si wafer due to the anisotropy of deposition. The shape of the SiO 2 is transferred to Si by DRIE to form the aspherical microlens. Microlenses with controllable apertures (0.4μmm - 2mm in diameter) and focal lengths (1mm - 12mm) can be fabricated using this simple, mass-production compatible and cost-effective method. The optical simulation verified the focal effect of the lens, which can be applied to infrared optics. Furthermore, a self-focusing acoustic transducer is fabricated using the Si microlens as a mold, providing potential good self-focusing effect for actuations and sensing.

AB - This work explores a new technique for 3D aspherical Si microlens fabrication using a shadow mask. With the shadow mask, a convex aspherical SiO 2 layer is sputter deposited on a Si wafer due to the anisotropy of deposition. The shape of the SiO 2 is transferred to Si by DRIE to form the aspherical microlens. Microlenses with controllable apertures (0.4μmm - 2mm in diameter) and focal lengths (1mm - 12mm) can be fabricated using this simple, mass-production compatible and cost-effective method. The optical simulation verified the focal effect of the lens, which can be applied to infrared optics. Furthermore, a self-focusing acoustic transducer is fabricated using the Si microlens as a mold, providing potential good self-focusing effect for actuations and sensing.

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ER -

Zhu J, Chen SJ, Lin CY, Oiler J, Wang H, Chen YC et al. The fabrication of 3D aspherical silicon microlenses using a shadow mask. In 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11. 2011. p. 2370-2373. 5969562. (2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11). doi: 10.1109/TRANSDUCERS.2011.5969562

The fabrication of 3D aspherical silicon microlenses using a shadow mask

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