The Extension of the FinFET Generation Towards Sub-3nm: The Strategy and Guidelines

Steve S. Chung, C. K. Chiang, H. Pai, E. R. Hsieh, J. C. Guo

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

3 Scopus citations

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Engineering

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Agricultural and Biological Sciences

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Earth and Planetary Sciences